ELECTROMECHANICAL DEFLECTIONS OF PIEZOELECTRIC TUBES WITH QUARTERED ELECTRODES

被引:98
作者
CHEN, CJ
机构
[1] IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
关键词
D O I
10.1063/1.107348
中图分类号
O59 [应用物理学];
学科分类号
摘要
The deflection of a piezoelectric tube, with the outer (or inner) metal coating sectioned into four quadrants, is analyzed. We show that by applying a voltage V on one of the quadrants, the electromechanical deflection is ( square-root 2d31VL2/pi-Dh), where d31 is the piezoelectric coefficient, L is the length, D the diameter, and h the wall thickness of the tube. The deflections calculated with it agree well with the results of finite-element calculations and direct experimental measurements. The formula can be used in the design and application of tube scanners in scanning tunneling microscopes and scanning force microscopes.
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页码:132 / 134
页数:3
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