EVALUATION OF THE COMPOSITION OF REACTIVELY EVAPORATED GEOX THIN-FILMS FROM OPTICAL-TRANSMISSION AND XPS DATA

被引：15

作者：

BEYNON, J ^{[1
]}

ELSAMANOUDY, MM ^{[1
]}

SHORT, EL ^{[1
]}

机构：

[1] BRUNEL UNIV,DEPT CHEM,UXBRIDGE UB8 3PH,MIDDX,ENGLAND

来源：

JOURNAL OF MATERIALS SCIENCE | 1988年 / 23卷 / 12期

关键词：

Computer Simulation - Mathematical Models - Optical Variables Measurement - Oxides--Thin Films - Spectroscopy; X-ray--Spectrum Analysis;

D O I：

10.1007/BF00551932

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Computer simulations of germanium 3d core spectra obtained with reactively evaporated GeOx thin films (0&lex&le2) have been developed using a modified Sanderson approach,in which five basic sub-units are produced by the conversion of germanium atoms in the primary coordination sphere into either -GeOx groups or -OGeOx groups on oxidation. The relative proportion of the five sub-units are adjusted until the best agreement with the experimental XPS spectra is obtainad. The volume fraction of germanium in GeOx obtianed using an optical transmittance model is compared with the number fraction obtained from XPS data over a range of oxygen partial pressure.

引用

页码：4363 / 4368

页数：6

共 9 条

[1] METALLIC ALUMINUM PARTICLE CONCENTRATION IN ALUMINUM-OXIDE THIN-FILMS [J].