VIBRATIONAL PROPERTIES OF HYDROGEN IN PROTON-IMPLANTED SILICON

被引:2
作者
TATARKIEWICZ, J [1 ]
WINER, K [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,D-7000 STUTTGART 80,FED REP GER
来源
PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1987年 / 139卷 / 02期
关键词
DEUTERIUM; -; Vibrations; HYDROGEN; SPECTROSCOPY; ABSORPTION; Applications; INFRARED;
D O I
10.1002/pssb.2221390208
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Some aspects of the infrared absorption spectra of crystalline silicon containing implanted hydrogen or deuterium are interpreted on the basis of simple atomic cluster calculations. It is shown that the vibrational properties of the implanted ions can be understood solely by taking into account the effect of the host silicon network on the local impurity vibrations.
引用
收藏
页码:409 / 415
页数:7
相关论文
共 20 条
[1]   VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM [J].
CARDONA, M .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :463-481
[2]  
CARDONA M, 1986, J MOL STRUCT, V141, P33
[3]   CRYSTAL STRUCTURES OF NEW FORMS OF SILICON + GERMANIUM [J].
KASPER, JS ;
RICHARDS, SM .
ACTA CRYSTALLOGRAPHICA, 1964, 17 (06) :752-&
[4]   EFFECT OF INVARIANCE REQUIREMENTS ON ELASTIC STRAIN ENERGY OF CRYSTALS WITH APPLICATION TO DIAMOND STRUCTURE [J].
KEATING, PN .
PHYSICAL REVIEW, 1966, 145 (02) :637-&
[5]  
LUCOVSKY G, 1984, TOP APPL PHYS, V56, P301
[6]   COUPLED LOCAL MODE VIBRATIONS IN A-SI ALLOY-FILMS [J].
LUCOVSKY, G ;
CHAO, SS ;
YANG, J ;
TYLER, JE ;
CZUBATYJ, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :353-357
[7]   VIBRATIONAL-SPECTRA OF ALPHA-SI-H, ALPHA-SI-F, AND ALPHA-GE-F - BETHE-LATTICE CALCULATIONS [J].
MARTINEZ, E ;
CARDONA, M .
PHYSICAL REVIEW B, 1983, 28 (02) :880-888
[8]   HYDROGEN IMPLANTATION INTO SILICON - INFRARED-ABSORPTION SPECTRA AND ELECTRICAL-PROPERTIES [J].
MUKASHEV, BN ;
TAMENDAROV, MF ;
TOKMOLDIN, SZ ;
FROLOV, VV .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1985, 91 (02) :509-522
[9]  
POLLARD WB, 1983, PHYS REV B, V29, P857
[10]   THE NATURE OF 2 INTENSE SI-H IR STRETCHING BANDS IN FZ-SI-H [J].
SHI, TS ;
XIE, LM ;
BAI, GR ;
QI, MW .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 131 (02) :511-517