COUPLED LOCAL MODE VIBRATIONS IN A-SI ALLOY-FILMS

被引:19
作者
LUCOVSKY, G [1 ]
CHAO, SS [1 ]
YANG, J [1 ]
TYLER, JE [1 ]
CZUBATYJ, W [1 ]
机构
[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572738
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:353 / 357
页数:5
相关论文
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