LOCAL BONDING OF OXYGEN AND HYDROGEN IN A-SI=H=O THIN-FILMS

被引:60
作者
LUCOVSKY, G
POLLARD, WB
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.572121
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:313 / 316
页数:4
相关论文
共 16 条
  • [1] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
  • [2] INFRARED BAND ASSIGNMENTS IN OXIDIZED HYDROGENATED A-SI FILMS
    JOHN, P
    ODEH, IM
    THOMAS, MJK
    TRICKER, MJ
    WILSON, JIB
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1981, 105 (02): : 499 - 505
  • [3] INFRARED VIBRATIONAL-SPECTRA OF CHLORINATED AND HYDROGENATED AMORPHOUS-SILICON
    KALEM, S
    CHEVALLIER, J
    ALDALLAL, S
    BOURNEIX, J
    [J]. JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 361 - 363
  • [4] ELECTRONIC AND STRUCTURAL-PROPERTIES OF PLASMA-DEPOSITED A-SI-O-H - STORY OF O2
    KNIGHTS, JC
    STREET, RA
    LUCOVSKY, G
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 279 - 284
  • [5] KNIGHTS JC, 1978, PHILOS MAG B, V37, P467, DOI 10.1080/01418637808225790
  • [6] Ley L., 1980, Journal of the Physical Society of Japan, V49, P1241
  • [7] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS
    LUCOVSKY, G
    [J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576
  • [8] LUCOVSKY G, 1978, PHYS REV B, V18, P4288
  • [9] LUCOVSKY G, UNPUB
  • [10] LUCOVSKY G, 1981, SPRINGER SERIES SOLI, V25, P87