NITROGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED ALPHA-SI-H FILMS

被引：178

作者：

LUCOVSKY, G ^{[1
]}

YANG, J ^{[1
]}

CHAO, SS ^{[1
]}

TYLER, JE ^{[1
]}

CZUBATYJ, W ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

PHYSICAL REVIEW B | 1983年 / 28卷 / 06期

关键词：

D O I：

10.1103/PhysRevB.28.3234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3234 / 3240

页数：7

共 18 条

[1] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[2] COTTON FA, 1972, ADV INORGANIC CHEM, pCH11
[3] CHARACTERIZATION OF GLOW-DISCHARGE DEPOSITED A-SI-H
FRITZSCHE, H
[J]. SOLAR ENERGY MATERIALS, 1980, 3 (04): : 447 - 501
[4] Galeener F. L., 1980, PHYS MOS INSULATORS, P77
[5] GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS
KNIGHTS, JC
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 159 - 170
[6] LOCAL BONDING OF OXYGEN AND HYDROGEN IN A-SI=H=O THIN-FILMS
LUCOVSKY, G
POLLARD, WB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 313 - 316
[7] OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS
LUCOVSKY, G
YANG, J
CHAO, SS
TYLER, JE
CZUBATYJ, W
[J]. PHYSICAL REVIEW B, 1983, 28 (06): : 3225 - 3233
[8] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS
LUCOVSKY, G
[J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576
[9] A STRUCTURAL INTERPRETATION OF THE INFRARED-ABSORPTION SPECTRA OF A-SI-H-O ALLOYS
LUCOVSKY, G
[J]. SOLAR ENERGY MATERIALS, 1982, 8 (1-3): : 165 - 175
[10] LUCOVSKY G, 1981, SPRINGER SER SOLID S, V22, P87