OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS

被引：431

作者：

LUCOVSKY, G ^{[1
]}

YANG, J ^{[1
]}

CHAO, SS ^{[1
]}

TYLER, JE ^{[1
]}

CZUBATYJ, W ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

PHYSICAL REVIEW B | 1983年 / 28卷 / 06期

关键词：

D O I：

10.1103/PhysRevB.28.3225

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3225 / 3233

页数：9

共 14 条

[1] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[2] CHARACTERIZATION OF GLOW-DISCHARGE DEPOSITED A-SI-H
FRITZSCHE, H
[J]. SOLAR ENERGY MATERIALS, 1980, 3 (04): : 447 - 501
[3] GALEENER FL, 1976, STRUCTURE EXCITATION, P223
[4] INFRARED BAND ASSIGNMENTS IN OXIDIZED HYDROGENATED A-SI FILMS
JOHN, P
ODEH, IM
THOMAS, MJK
TRICKER, MJ
WILSON, JIB
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1981, 105 (02): : 499 - 505
[5] ELECTRONIC AND STRUCTURAL-PROPERTIES OF PLASMA-DEPOSITED A-SI-O-H - STORY OF O2
KNIGHTS, JC
STREET, RA
LUCOVSKY, G
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 279 - 284
[6] KNIGHTS JC, 1976, STRUCTURE EXCITATION, P296
[7] LOCAL BONDING OF OXYGEN AND HYDROGEN IN A-SI=H=O THIN-FILMS
LUCOVSKY, G
POLLARD, WB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 313 - 316
[8] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS
LUCOVSKY, G
[J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576
[9] A STRUCTURAL INTERPRETATION OF THE INFRARED-ABSORPTION SPECTRA OF A-SI-H-O ALLOYS
LUCOVSKY, G
[J]. SOLAR ENERGY MATERIALS, 1982, 8 (1-3): : 165 - 175
[10] LUCOVSKY G, 1978, PHYS REV B, V18, P4288