DETECTION OF ELECTRON-ENERGY DISTRIBUTION FUNCTION BY FINITE IMPULSE-RESPONSE FILTER

被引：29

作者：

KIMURA, T

YONEYA, A

OHE, K

机构：

[1] Department of Systems Engineering, Nagoya Institute of Technology, Showa-ku Nagoya

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 08期

关键词：

ELECTRON ENERGY DISTRIBUTION FUNCTION; LANGMUIR PROBE; DRUYVESTEYN METHOD; POSITIVE COLUMN; FINITE IMPULSE RESPONSE; CONVOLUTION;

D O I：

10.1143/JJAP.30.1877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electron energy distribution function (EEDF) is calculated from digitized probe current-voltage characteristics by using a finite impulse response (FIR) filter, in which filter horizon and cutoff frequency are flexibly chosen. Good agreement between the measured EEDF and the theoretical one is obtained in application of the filter to a He positive column.

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页码：1877 / 1881

页数：5

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