THE GROWTH AND PHYSICAL-PROPERTIES OF HIGH-QUALITY PSEUDOMORPHIC INXGA1-XAS HEMT STRUCTURES

被引:3
作者
MACE, DR [1 ]
GRIMSHAW, MP [1 ]
RITCHIE, DA [1 ]
CHURCHILL, AC [1 ]
PEPPER, M [1 ]
JONES, GAC [1 ]
机构
[1] TOSHIBA CAMBRIDGE RES CTR,CAMBRIDGE CB4 4WE,ENGLAND
关键词
D O I
10.1016/0022-0248(93)90692-P
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A series of high quality modulation doped GaAs-AlGaAs heterostructures incorporating a strained 10 nm InxGa1-xAs layer at the hetero-interface have been grown. The indium mole fraction, x, was varied from 0 (the control) to 0.25 in 0.05 steps. Other growth conditions were unaltered for all wafers. The variation of electronic and structural properties of the wafers was measured as a function of x with a view to optimizing the structure for use in one-dimensional ballistic transport measurements.
引用
收藏
页码:601 / 605
页数:5
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