A THEORETICAL ASSESSMENT OF POSSIBILITY OF SELECTED-AREA MASS-SPECTROMETRIC ANALYSIS USING A FOCUSED ION BEAM

被引：24

作者：

LONG, JVP

机构：

来源：

BRITISH JOURNAL OF APPLIED PHYSICS | 1965年 / 16卷 / 09期

关键词：

D O I：

10.1088/0508-3443/16/9/306

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1277 / &

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