EPITAXIAL ERBIUM SILICIDE FILMS ON SI(111) SURFACE - FABRICATION, STRUCTURE, AND ELECTRICAL-PROPERTIES

被引：53

作者：

DUBOZ, JY

BADOZ, PA

PERIO, A

OBERLIN, JC

DAVITAYA, FA

CAMPIDELLI, Y

CHROBOCZEK, JA

机构：

来源：

关键词：

D O I：

10.1016/0169-4332(89)90533-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：171 / 177

页数：7

共 17 条

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[4] THIN METALLIC SILICIDE FILMS EPITAXIALLY GROWN ON SI(111) AND THEIR ROLE IN SI-METAL-SI DEVICES
DERRIEN, J
DAVITAYA, FA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2111 - 2120
[5] GIBSON JM, 1986, MRS S P, V56
[6] HOUSSAY E, 1988, P C SOLID COMPOUNDS
[7] EPITAXIAL-GROWTH OF RARE-EARTH SILICIDES ON (111) SI
KNAPP, JA
PICRAUX, ST
[J]. APPLIED PHYSICS LETTERS, 1986, 48 (07) : 466 - 468
[8] KNAPP JA, 1986, MATER RES SOC S P, V54, P261
[9] THIN-FILMS OF RARE-EARTH-METAL SILICIDES
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BELITSKY, VVF
KHODIN, AA
[J]. THIN SOLID FILMS, 1986, 141 (02) : 277 - 285
[10] NEMANICH RJ, 1986, MRS S P, V54