DEFECTS IN SI-SIO2 STRUCTURES INTRODUCED BY SPUTTER METALLIZATION

被引：2

作者：

ALEXANDROVA, S

KIROV, K

SZEKERES, A

机构：

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90390-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：37 / 46

页数：10

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