PROFILE STUDIES OF MEV IONS IMPLANTED INTO SI

被引:44
作者
WONG, H [1 ]
DENG, E [1 ]
CHEUNG, NW [1 ]
CHU, PK [1 ]
STRATHMAN, EM [1 ]
STRATHMAN, MD [1 ]
机构
[1] CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
关键词
D O I
10.1016/0168-583X(87)90875-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:447 / 451
页数:5
相关论文
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