共 7 条
[1]
ANISOTROPIC ETCHING OF SILICON
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978, 25 (10)
:1185-1193
[4]
KAJIMURA T, UNPUBLISHED
[5]
THERMAL PERFORMANCE AND LIMITATIONS OF SILICON-SUBSTRATE PACKAGED GAAS LASER ARRAYS
[J].
APPLIED OPTICS,
1978, 17 (05)
:778-784