INCORPORATION OF METALS INTO FLUOROPOLYMER FILMS SYNTHESIZED BY PLASMA TECHNIQUES

被引：45

作者：

KAY, E

DILKS, A

HETZLER, U

机构：

来源：

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1978年 / A12卷 / 09期

关键词：

D O I：

10.1080/00222337808063200

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：1393 / 1398

页数：6

共 15 条

[1] CARBAJAL BG, 1966, Patent No. 3318790
[2] CLARK DT, J POLYM SCI PC
[3] CLARK DT, POLYMER SURFACES
[4] ION-SURFACE INTERACTIONS IN PLASMA ETCHING
COBURN, JW
WINTERS, HF
CHUANG, TJ
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3532 - 3540
[5] SOME CHEMICAL ASPECTS OF THE FLUOROCARBON PLASMA ETCHING OF SILICON AND ITS COMPOUNDS
COBURN, JW
KAY, E
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1979, 23 (01) : 33 - 41
[6] COBURN JW, 1977, 3RD P INT C SOL SURF, V2, P1257
[7] COBURN JW, 1977, 7TH P INT VAC C 3RD, V2, P1257
[8] CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS
HETZLER, U
KAY, E
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5617 - 5623
[9] KAY E, UNPUBLISHED
[10] KAY E, 1976, VIDE, V183, P89