LEVITATION OF A MICROMACHINED ROTOR FOR APPLICATION IN A ROTATING GYROSCOPE

被引：42

作者：

SHEARWOOD, C ^{[1
]}

WILLIAMS, CB ^{[1
]}

MELLOR, PH ^{[1
]}

YATES, RB ^{[1
]}

GIBBS, MRJ ^{[1
]}

MATTINGLEY, AD ^{[1
]}

机构：

[1] UNIV SHEFFIELD,DEPT PHYS,SHEFFIELD CTR ADV MAGNET MAT & DEVICES,SHEFFIELD S3 7RH,S YORKSHIRE,ENGLAND

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 21期

关键词：

MAGNETIC LEVITATION; GYROSCOPES; MICROMOTORS;

D O I：

10.1049/el:19951232

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 mu m diameter, 12 mu m thick rotor is levitated to a height of 30 mu m.

引用

页码：1845 / 1846

页数：2