CRYSTAL-STRUCTURES AND OPTICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPUTTERING-TYPE ELECTRON-CYCLOTRON RESONANCE MICROWAVE PLASMA

被引：31

作者：

MATSUOKA, M

ONO, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576302

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2975 / 2982

页数：8

共 33 条

[1] OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS
ARANOVICH, J
ORTIZ, A
BUBE, RH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04): : 994 - 1003
[2] BEAR J, 1958, J APPL CHEM-USSR, V8, P72
[3] Brown G. H., 1971, PHOTOCHROMISM
[4] CHUBACHI N, 1977, OYO BUTSURI, V46, P633
[5] DEVRIES AJ, 1969, IEEE ULTRASONIC S ST
[6] HICKERNELL FS, 1973, J APPL PHYS, V44, P1061, DOI 10.1063/1.1662307
[7] ACOUSTIC MICROSCOPY AT OPTICAL WAVELENGTHS
JIPSON, V
QUATE, CF
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (12) : 789 - 791
[8] KIYOYAMA Y, 1969, ANAL CHEM, V38, P1069
[9] KOBAYASHI A, 1968, SEMICONDUCTORS
[10] LUTY F, 1968, PHYSICS COLOR CTR