PREPARATION AND CHARACTERIZATION OF SOME TIN OXIDE-FILMS

被引：33

作者：

UEN, TM ^{[1
]}

HUANG, KF ^{[1
]}

CHEN, MS ^{[1
]}

GOU, YS ^{[1
]}

机构：

[1] NATL CHIAO TUNG UNIV,INST ELECTROOPTICAL,HSINCHU,TAIWAN

来源：

THIN SOLID FILMS | 1988年 / 158卷 / 01期

关键词：

ELECTRIC CONDUCTIVITY - HALL EFFECT - MICROSCOPIC EXAMINATION - Scanning Electron Microscopy - SPECTROSCOPY; MOSSBAUER;

D O I：

10.1016/0040-6090(88)90304-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tin oxide films were successully prepared by the reactive evaporation method with a dc glow discharge of oxygen. The structure and composition of the films were characterized by Mossbauer spectroscopy, X-ray diffraction and scanning electron microscopy. The valency of tin atoms in the films determined by Mossbauer spectroscopy is mostly divalent in the samples prepared without discharge, but mostly tetravalent in the samples prepared with discharge. Measurements of electrical conductivity and Hall mobility were also carried out and the data were found to correlate with the concentration ratio left bracket Sn**4** plus right bracket / left bracket Sn**2** plus right bracket determined from Mossbauer spectroscopy.

引用

页码：69 / 80

页数：12

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