THIN-FILMS OF THE PROTONIC CONDUCTOR GADOLINIUM-DOPED BARIUM CERATE BY SOLID-SOURCE METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引:7
作者
JIANG, N [1 ]
BUCHANAN, RM [1 ]
LU, Z [1 ]
STEVENSON, DA [1 ]
HISKES, R [1 ]
DICAROLIS, SA [1 ]
机构
[1] HEWLETT PACKARD CORP,HEWLETT PACKARD LABS,PALO ALTO,CA 94303
关键词
D O I
10.1063/1.111361
中图分类号
O59 [应用物理学];
学科分类号
摘要
Gadolinium-doped barium cerate thin films have been grown on r-plane (1102BAR) sapphire and on silver foil substrates by single solid-source metalorganic chemical vapor deposition using tetramethylheptanedionate mixed powder sources. The films have been deposited at 800-degrees-C at a reduced pressure of 6 Torr. The bulk conductivity of the thin films, as measured by an alternating current impedance method, is close to that of sintered ceramic samples, and shows a similar hydrogen/deuterium isotope effect, providing evidence of protonic conduction.
引用
收藏
页码:3104 / 3106
页数:3
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