ION-INDUCED SILICIDE FORMATION IN NIOBIUM THIN-FILMS

[1] RADIATION EFFECTS ON SOLID-STATE DIFFUSION [J]. THIN SOLID FILMS, 1975, 25 (01) : 107 - 156

[2] SPUTTERING EXPERIMENTS IN THE HIGH ENERGY REGION [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 279 - 289

[3] RADIATION ENHANCEMENT OF BULK DIFFUSION IN 10 PERCENT ZN-90 PERCENT CU BY 30-KEV NE+ ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (10) : 1913 - &

[4] BRICE DK, 1975, ION IMPLANTATION RAN, V1, P85

[5] DAMASK AC, 1963, POINT DEFECTS METALS, P284

[6] DEARNALEY G, 1973, ION IMPLANTATION, P769

[7] RADIATION ENHANCED DIFFUSION IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) : 1713 - 1721

[8] RECOIL IMPLANTATION FROM A THIN SOURCE .2. EXTENSION TO PROBLEMS OF RECOIL SPUTTERING AND OF MODERATELY THICK SOURCES [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 175 - 182

[9] GOLDSCHMIDT HJ, 1967, INTERSTITIAL ALLOYS, P306

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386

[1] RADIATION EFFECTS ON SOLID-STATE DIFFUSION [J]. THIN SOLID FILMS, 1975, 25 (01) : 107 - 156

[2] SPUTTERING EXPERIMENTS IN THE HIGH ENERGY REGION [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 279 - 289

[3] RADIATION ENHANCEMENT OF BULK DIFFUSION IN 10 PERCENT ZN-90 PERCENT CU BY 30-KEV NE+ ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (10) : 1913 - &

[4] BRICE DK, 1975, ION IMPLANTATION RAN, V1, P85

[5] DAMASK AC, 1963, POINT DEFECTS METALS, P284

[6] DEARNALEY G, 1973, ION IMPLANTATION, P769

[7] RADIATION ENHANCED DIFFUSION IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) : 1713 - 1721

[8] RECOIL IMPLANTATION FROM A THIN SOURCE .2. EXTENSION TO PROBLEMS OF RECOIL SPUTTERING AND OF MODERATELY THICK SOURCES [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 175 - 182

[9] GOLDSCHMIDT HJ, 1967, INTERSTITIAL ALLOYS, P306

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386