METALORGANIC VAPOR-PHASE EPITAXY GROWTH AND CHARACTERISTICS OF MG-DOPED GAN USING GAN SUBSTRATES

被引:20
作者
DETCHPROHM, T [1 ]
HIRAMATSU, K [1 ]
SAWAKI, N [1 ]
AKASAKI, I [1 ]
机构
[1] MEIJO UNIV,DEPT ELECT & ELECTR ENGN,TEMPAKU KU,NAGOYA,AICHI 468,JAPAN
关键词
D O I
10.1016/0022-0248(94)91049-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The homoepitaxial GaN:Mg was grown on GaN/ZnO/sapphire subtrates at various temperatures (1050-110 degrees C) by metalorganic vapor phase epitaxy (MOVPE). The GaN layers were hundreds of micrometers thick and prepared by hydride vapor phase epitaxy (HVPE) using sapphire substrates with ZnO buffer layers. The epitaxial layers showed strong blue light emitting intensity and the red shifts (400 to 445 nm) of their CL spectra were observed as the growth temperatures became higher. The same red-shifted phenomenon was also confirmed for the heteroepitaxial layers on the sapphire substrates. These results imply that more blue emission centers related to Mg are formed as the growth temperature grow higher. The blue-light emitting diodes of GaN:Mg/GaN, utilizing n-type GaN substrate which were hundreds of micrometers thick, were fabricated for the first time using electrodes on the back surface of electroconductive GaN substrates. The electroluminescence spectra of the light emitting diode (LED) revealed blue-light emission peaking at 430 nm. The current rectification of I-V characteristics suggests that the emission originates from p-n junction.
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收藏
页码:192 / 196
页数:5
相关论文
共 9 条
  • [1] AKASAKI I, 1990, SPIE, V1361, P138
  • [2] P-TYPE CONDUCTION IN MG-DOPED GAN TREATED WITH LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI)
    AMANO, H
    KITO, M
    HIRAMATSU, K
    AKASAKI, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12): : L2112 - L2114
  • [3] AMANO H, 1990, I PHYS C SER, V106, P725
  • [4] HYDRIDE VAPOR-PHASE EPITAXIAL-GROWTH OF A HIGH-QUALITY GAN FILM USING A ZNO BUFFER LAYER
    DETCHPROHM, T
    HIRAMATSU, K
    AMANO, H
    AKASAKI, I
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (22) : 2688 - 2690
  • [5] THE HOMOEPITAXY OF GAN BY METALORGANIC VAPOR-PHASE EPITAXY USING GAN SUBSTRATES
    DETCHPROHM, T
    HIRAMATSU, K
    SAWAKI, N
    AKASAKI, I
    [J]. JOURNAL OF CRYSTAL GROWTH, 1994, 137 (1-2) : 170 - 174
  • [6] ULTRAVIOLET AND VIOLET LIGHT-EMITTING GAN DIODES GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION
    GOLDENBERG, B
    ZOOK, JD
    ULMER, RJ
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (04) : 381 - 383
  • [7] HIROSAWA K, 1993, JPN J APPL PHYS, V32, pL1030
  • [8] HOLE COMPENSATION MECHANISM OF P-TYPE GAN FILMS
    NAKAMURA, S
    IWASA, N
    SENOH, M
    MUKAI, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (5A): : 1258 - 1266
  • [9] HIGH-POWER GAN P-N-JUNCTION BLUE-LIGHT-EMITTING DIODES
    NAKAMURA, S
    MUKAI, T
    SENOH, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (12A): : L1998 - L2001