EVALUATION OF THE LIFETIME AND FAILURE PROBABILITY FOR INTER-POLY OXIDES FROM RVS MEASUREMENTS

被引：7

作者：

MARTIN, A ^{[1
]}

OSULLIVAN, P ^{[1
]}

MATHEWSON, A ^{[1
]}

MASON, B ^{[1
]}

BEECH, C ^{[1
]}

机构：

[1] GEC PLESSEY SEMICONDUCTORS LTD,PLYMOUTH PL6 7BQ,DEVON,ENGLAND

来源：

MICROELECTRONICS JOURNAL | 1994年 / 25卷 / 07期

关键词：

Constant voltage stress (CVS) measurements - Failure probability - Interpoly oxides - Ramped voltage stress (RVS) measurements;

D O I：

10.1016/0026-2692(94)90040-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper a practical characterization methodology for inter-poly oxides is described. Three different inter-poly oxides were tested, characterized and compared. The test included Constant Voltage Stress (CVS) and Ramped Voltage Stress (RVP) measurements on small area capacitors and only RVS on large area capacitors. It is confirmed that the 1/E Berkeley model is suitable for inter-poly oxide characterization. A method for the prediction of the failure probability from RVS data of large area capacitors at operating conditions is demonstrated on the basis of the 1/E model for the comparison of the inter-poly oxides.

引用

页码：553 / 557

页数：5