MANIPULATION OF 1-MUM BUBBLES WITH COARSE (GREATER-THAN 4 MUM) OVERLAY PATTERNS

被引：32

作者：

LIN, YS

ALMASI, GS

KEEFE, GE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 12期

关键词：

D O I：

10.1063/1.323602

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5201 / 5208

页数：8

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