MODULATION OF DOPANT SEGREGATION BY ELECTRIC CURRENTS IN CZOCHRALSKI-TYPE CRYSTAL GROWTH

被引:46
作者
LICHTENSTEIGER, M
WITT, AF
GATOS, HC
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D O I
10.1149/1.2408183
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1013 / +
页数:1
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