共 12 条
[1]
ASKENOV II, 1979, SOV J PLASMA PHYS, V4, P425
[2]
Daalder J. E., 1978, THESIS EINDHOVEN U T
[4]
Demidenko I. I., 1976, Soviet Physics - Technical Physics, V21, P284
[7]
KIMBLIN CW, 1973, J APPL PHYS, V44, P3067
[8]
INDUSTRIAL DEPOSITION OF BINARY, TERNARY, AND QUATERNARY NITRIDES OF TITANIUM, ZIRCONIUM, AND ALUMINUM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:2173-2179