AUGER-ELECTRON SPECTROSCOPY STUDIES OF SPUTTER DEPOSITION AND SPUTTER REMOVAL OF MO FROM VARIOUS METAL-SURFACES

被引：90

作者：

TARNG, ML

WEHNER, GK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 05期

关键词：

D O I：

10.1063/1.1661490

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2268 / &

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