CONE FORMATION ON METAL TARGETS DURING SPUTTERING

[1] BEHRISCH R, 1964, ERGEB EXAKT NATURWIS, V35, P384

[2] Guenterschulze A., 1942, Z PHYS, V119, P685

[3] HEIL O, 1965, DA28043AMC00429 CONT

[4] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT [J]. JOURNAL OF MATERIALS SCIENCE, 1969, 4 (01) : 56 - &

[5] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1762 - 1765

[6] CONTROLLED SPUTTERING OF METALS BY LOW-ENERGY HG IONS [J]. PHYSICAL REVIEW, 1956, 102 (03): : 690 - 704

[7] SPUTTERING YIELDS FOR NORMALLY INCIDENT HG+-ION BOMBARDMENT AT LOW ION ENERGY [J]. PHYSICAL REVIEW, 1957, 108 (01): : 35 - 45

[8] MOMENTUM TRANSFER IN SPUTTERING BY ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (02) : 270 - 271

[9] 1966, NONR1589 CONTR

[1] BEHRISCH R, 1964, ERGEB EXAKT NATURWIS, V35, P384

[2] Guenterschulze A., 1942, Z PHYS, V119, P685

[3] HEIL O, 1965, DA28043AMC00429 CONT

[4] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT [J]. JOURNAL OF MATERIALS SCIENCE, 1969, 4 (01) : 56 - &

[5] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1762 - 1765

[6] CONTROLLED SPUTTERING OF METALS BY LOW-ENERGY HG IONS [J]. PHYSICAL REVIEW, 1956, 102 (03): : 690 - 704

[7] SPUTTERING YIELDS FOR NORMALLY INCIDENT HG+-ION BOMBARDMENT AT LOW ION ENERGY [J]. PHYSICAL REVIEW, 1957, 108 (01): : 35 - 45

[8] MOMENTUM TRANSFER IN SPUTTERING BY ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (02) : 270 - 271

[9] 1966, NONR1589 CONTR