SPUTTERING YIELDS FOR NORMALLY INCIDENT HG+-ION BOMBARDMENT AT LOW ION ENERGY

被引：95

作者：

WEHNER, GK

机构：

来源：

PHYSICAL REVIEW | 1957年 / 108卷 / 01期

关键词：

D O I：

10.1103/PhysRev.108.35

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：35 / 45

页数：11

共 23 条

[1] SPUTTERING OF ALKALI ATOMS BY INERT GAS IONS OF LOW ENERGY
BRADLEY, RC
[J]. PHYSICAL REVIEW, 1954, 93 (04): : 719 - 728
[2] The deposition of sputtered films
Ditchburn, RW
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1933, 141 (843) : 169 - 188
[3] ENGEL AV, 1932, ELEKTRISCHE GASESTLA, V1, P37
[4] Fetz H, 1940, ANN PHYS-BERLIN, V37, P1
[5] About the Sputtering at oblique Collision of the Ions
Fetz, H.
[J]. ZEITSCHRIFT FUR PHYSIK, 1942, 119 (9-10): : 590 - 601
[6] GUENTHERSCHULZE A, 1926, ANN PHYSIK, V36, P563
[7] ELECTRON EJECTION FROM MO BY HE+, HE++, AND HE-2(+)
HAGSTRUM, HD
[J]. PHYSICAL REVIEW, 1953, 89 (01): : 244 - 255
[8] THEORY OF AUGER EJECTION OF ELECTRONS FROM METALS BY IONS
HAGSTRUM, HD
[J]. PHYSICAL REVIEW, 1954, 96 (02): : 336 - 365
[9] AUGER EJECTION OF ELECTRONS FROM TUNGSTEN BY NOBLE GAS IONS
HAGSTRUM, HD
[J]. PHYSICAL REVIEW, 1954, 96 (02): : 325 - 335
[10] Holland L., 1953, VACUUM, V3, P245