NANOMETER-SCALE PATTERNING OF YBCO THIN-FILMS

被引:6
作者
MACAULAY, JM [1 ]
BAO, Z [1 ]
BI, B [1 ]
GURVITCH, M [1 ]
HAN, S [1 ]
LIN, JY [1 ]
LUKENS, J [1 ]
NADGORNY, B [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0749-6036(92)90254-3
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Micro-scale bridges are fabricated in superconducting thin films of YBCO. The bridges are modified using a highly focussed, nanometer diameter, ≤30keV energy electron probe. Data are presented on the modified bridges which indicate that this approach may be useful for fabricating weak links and Josephson junctions. Consideration is given to mechanisms which may be responsible for modification of the YBCO thin film. © 1992.
引用
收藏
页码:211 / 213
页数:3
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