GROWTH OF CEO2 THIN-FILMS BY LASER ABLATION

被引:1
作者
AMIRHAGHI, S [1 ]
BEECH, F [1 ]
VICKERS, M [1 ]
BARNES, P [1 ]
TARLING, S [1 ]
BOYD, IW [1 ]
机构
[1] UNIV LONDON BIRKBECK COLL,DEPT CRYSTALLOG,LONDON WC1E 7HX,ENGLAND
关键词
THIN FILMS; LASER APPLICATIONS; SUPERCONDUCTORS;
D O I
10.1049/el:19911427
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thin films of CeO2 have been grown in situ on silicon (111) and silicon (100) by laser ablation. Results from X-ray diffraction theta-2-theta scans indicate that both the substrate temperature and the oxygen partial pressure are crucial in promoting growth in the preferential [111] direction.
引用
收藏
页码:2304 / 2305
页数:2
相关论文
共 4 条
  • [1] AMIRHAGHI S, IN PRESS APPL SURF S
  • [2] Y-BA-CU-O THIN-FILM ON SI SUBSTRATE
    HARADA, K
    FUJIMORI, N
    YAZU, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08): : L1524 - L1526
  • [3] CERAMIC LAYER EPITAXY BY PULSED LASER DEPOSITION IN AN ULTRAHIGH-VACUUM SYSTEM
    KOINUMA, H
    NAGATA, H
    TSUKAHARA, T
    GONDA, S
    YOSHIMOTO, M
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (18) : 2027 - 2029
  • [4] EPITAXIAL CEO2 FILMS AS BUFFER LAYERS FOR HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS
    WU, XD
    DYE, RC
    MUENCHAUSEN, RE
    FOLTYN, SR
    MALEY, M
    ROLLETT, AD
    GARCIA, AR
    NOGAR, NS
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (19) : 2165 - 2167