ANISOTROPIC STRUCTURAL, ELECTRONIC, AND OPTICAL-PROPERTIES OF INGAAS GROWN BY MOLECULAR-BEAM EPITAXY ON MISORIENTED SUBSTRATES

被引:18
作者
GOLDMAN, RS [1 ]
WIEDER, HH [1 ]
KAVANAGH, KL [1 ]
RAMMOHAN, K [1 ]
RICH, DH [1 ]
机构
[1] UNIV SO CALIF, DEPT MAT SCI & ENGN, PHOTON MAT & DEVICES LAB, LOS ANGELES, CA 90089 USA
关键词
D O I
10.1063/1.112071
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the structural, electronic, and optical properties of partially strain-relaxed InxGa1-xAs layers, grown by molecular beam epitaxy on both misoriented and nominally flat (001) GaAs substrates. We find large anisotropies in bulk strain relaxation, interfacial misfit dislocation density, dark-line defect density, and electron mobility, as well as a polarization anisotropy in cathodoluminescence for epilayers grown on misoriented substrates, in comparison with those grown on flat substrates.
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页码:1424 / 1426
页数:3
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[31]  
WIE CR, 1988, SPIE P, V877, P41