IMAGING MICROANALYSIS OF SILICON-NITRIDE CERAMICS WITH A HIGH-RESOLUTION SCANNING ION MICROPROBE

被引：8

作者：

CHABALA, JM

LEVISETTI, R

BRADLEY, SA

KARASEK, KR

机构：

[1] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637

[2] ALLIED SIGNAL ENGN MAT RES CTR,DES PLAINES,IL 60017

来源：

APPLIED SURFACE SCIENCE | 1987年 / 29卷 / 03期

关键词：

D O I：

10.1016/0169-4332(87)90035-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：300 / 316

页数：17

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