SCANNING ION MICROSCOPY - ELEMENTAL MAPS AT HIGH LATERAL RESOLUTION

被引：54

作者：

LEVISETTI, R ^{[1
]}

WANG, YL ^{[1
]}

CROW, G ^{[1
]}

机构：

[1] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637

来源：

APPLIED SURFACE SCIENCE | 1986年 / 26卷 / 03期

关键词：

* This article was one of a series of invited review papers given at the ASTM symposium on Small Area Solids and Surface Analysis; held as part of the 1985 Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy; which took place in New Orleans; February 25 to March 1; 1985. ** This work was supported by the National Science Foundation under Grant No. DMR-8007978; and partially by the Materials Research Laboratory at the University of Chicago;

D O I：

10.1016/0169-4332(86)90067-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：249 / 264

页数：16

共 17 条

[1] SIMS MICRO-ANALYSIS WITH A GALLIUM ION MICROPROBE
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WAUGH, AR
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 375 - 382
[2] BAYLY AR, 1983, SCANNING ION MICROSC, V1, P23
[3] BUSHINSKY D, 1985, UNPUB 7TH ANN M AM S
[4] DAUMS N, 1969, CR HEBD ACAD SCI, V268, pC373
[5] LEFEVRE R, 1976, CALC TISS RES, V19, P251
[6] HIGH SPATIAL-RESOLUTION SIMS WITH THE UC-HRL SCANNING ION MICROPROBE
LEVISETTI, R
WANG, YL
CROW, G
[J]. JOURNAL DE PHYSIQUE, 1984, 45 (NC9): : 197 - 205
[7] HIGH-RESOLUTION SCANNING ION PROBES - APPLICATIONS TO PHYSICS AND BIOLOGY
LEVISETTI, R
FOX, TR
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 139 - 149
[8] ION CHANNELING EFFECTS IN SCANNING ION MICROSCOPY WITH A 60 KEV GA+ PROBE
LEVISETTI, R
FOX, TR
LAM, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 205 (1-2): : 299 - 309
[9] HIGH-RESOLUTION SCANNING-ION-MICROPROBE STUDY OF GRAPHITE AND ITS INTERCALATION COMPOUNDS
LEVISETTI, R
CROW, G
WANG, YL
PARKER, NW
MITTLEMAN, R
[J]. PHYSICAL REVIEW LETTERS, 1985, 54 (24) : 2615 - 2618
[10] LEVISETTI R, 1985, SCANNING ELECTRON MI, V2, P535

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