SIMS MICRO-ANALYSIS WITH A GALLIUM ION MICROPROBE

[1] BAYLY AR, 1983, UNPUB P C SCANNING E

[2] ATOM-PROBE FIELD-ION MICROSCOPY OF A HIGH-INTENSITY GALLIUM ION-SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 203 - 206

[3] GNASER H, 1982, 29TH P INT FIELD ION, P399

[4] LEVISETTI R, 1983, 29TH P FIELD ION EM, P417

[5] LIEBL H, NBS SPECIAL PUBLICAT, V427, P1

[6] DEPTH PROFILING BY SIMS DEPTH RESOLUTION, DYNAMIC-RANGE AND SENSITIVITY [J]. SURFACE AND INTERFACE ANALYSIS, 1982, 4 (02) : 35 - 41

[7] MORRISON GH, 1975, ANAL CHEM, V47, pA922

[8] HIGH-RESOLUTION, ION-BEAM PROCESSES FOR MICROSTRUCTURE FABRICATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1610 - 1612

[9] WAUGH AR, 1983, UNPUB P C LOW ENERGY

[10] WAUGH AR, 1982, 29TH P INT FIELD EM, P409

[1] BAYLY AR, 1983, UNPUB P C SCANNING E

[2] ATOM-PROBE FIELD-ION MICROSCOPY OF A HIGH-INTENSITY GALLIUM ION-SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 203 - 206

[3] GNASER H, 1982, 29TH P INT FIELD ION, P399

[4] LEVISETTI R, 1983, 29TH P FIELD ION EM, P417

[5] LIEBL H, NBS SPECIAL PUBLICAT, V427, P1

[6] DEPTH PROFILING BY SIMS DEPTH RESOLUTION, DYNAMIC-RANGE AND SENSITIVITY [J]. SURFACE AND INTERFACE ANALYSIS, 1982, 4 (02) : 35 - 41

[7] MORRISON GH, 1975, ANAL CHEM, V47, pA922

[8] HIGH-RESOLUTION, ION-BEAM PROCESSES FOR MICROSTRUCTURE FABRICATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1610 - 1612

[9] WAUGH AR, 1983, UNPUB P C LOW ENERGY

[10] WAUGH AR, 1982, 29TH P INT FIELD EM, P409