DEFORMATION OF SINGLE CRYSTAL WAFERS OF SILICON CAUSED BY LAPPING

被引：5

作者：

YAMAGISHI, S

机构：

来源：

关键词：

D O I：

10.1143/JJAP.10.589

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：589 / +

页数：1

共 11 条

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