CONCENTRATION PROFILES OBTAINED BY AUGER SPECTROMETRY AND ION ETCHING - CONCENTRATION GRADIENT EFFECT AND DETERMINATION OF DEPTH ANALYSIS

被引：8

作者：

GUGLIELMACCI, JM

GILLET, M

机构：

来源：

SURFACE SCIENCE | 1980年 / 94卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(80)90016-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：424 / 434

页数：11

共 16 条

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[10] USE OF AUGER-ELECTRON SPECTROSCOPY AND INERT-GAS SPUTTERING FOR OBTAINING CHEMICAL PROFILES [J].

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