KINETIC-MODEL OF MORPHOLOGICAL INSTABILITIES IN CHEMICAL VAPOR-DEPOSITION

被引：27

作者：

PALMER, BJ ^{[1
]}

GORDON, RG ^{[1
]}

机构：

[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138

来源：

THIN SOLID FILMS | 1989年 / 177卷

关键词：

D O I：

10.1016/0040-6090(89)90563-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：141 / 159

页数：19

共 16 条

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