ELLIPSOMETRIC MEASUREMENTS OF PLASMA OXIDATION OF NB AND TA AND THEIR INTERPRETATION

被引:11
作者
KNORR, K
LESLIE, JD
机构
[1] INST MAX VON LAUE PAUL LANGEVIN,GRENOBLE,FRANCE
[2] CTR RECH TRES BASSES TEMP,GRENOBLE,FRANCE
关键词
D O I
10.1149/1.2401923
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:805 / 808
页数:4
相关论文
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