PERFORMANCE OF MULTILAYER COATED DIFFRACTION GRATINGS IN THE EUV

被引：10

作者：

KESKIKUHA, RAM

THOMAS, RJ

GUM, JS

CONDOR, CE

机构：

[1] NASA Goddard Space Flight Center, Greenbelt, MD

来源：

APPLIED OPTICS | 1990年 / 29卷 / 31期

关键词：

D O I：

10.1364/AO.29.004529

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

[No abstract available]

引用

页码：4529 / 4531

页数：3

共 19 条

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