LAYERED SYNTHETIC MICROSTRUCTURE TECHNOLOGY CONSIDERATIONS FOR THE EXTREME ULTRAVIOLET

被引：44

作者：

KESKIKUHA, RAM

机构：

来源：

APPLIED OPTICS | 1984年 / 23卷 / 20期

关键词：

D O I：

10.1364/AO.23.003534

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3534 / 3537

页数：4

共 20 条

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