ORGANIC PATCH SENSOR FOR ELECTROOPTIC MEASUREMENT OF ELECTRICAL SIGNALS IN INTEGRATED-CIRCUITS

被引：7

作者：

NAGATSUMA, T ^{[1
]}

YAITA, M ^{[1
]}

SHINAGAWA, M ^{[1
]}

AMANO, M ^{[1
]}

SHUTO, Y ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, OPTOELECTR LABS, TOKAI, IBARAKI 31911, JAPAN

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 11期

关键词：

ELECTROOPTICS; INTEGRATED CIRCUITS; MEASUREMENT; OPTOELECTRONICS;

D O I：

10.1049/el:19910583

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A highly sensitive, versatile and low-cost electric field sensor has been developed for measuring internal electrical signals in integrated circuits using an electro-optic sampling technique. This sensor uses an organic nonlinear optical (NLO) polymer coated on thin polyimide films and is directly bonded to the circuit under test without a mirror coating. Electro-optic sampling was conducted using the sensor, and a voltage sensitivity of less than a few tens of millivolts was obtained.

引用

页码：932 / 934

页数：3

共 6 条

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