MAGNESIUM-OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION FROM MAGNESIUM 2-ETHYLHEXANOATE

被引：30

作者：

MARUYAMA, T

SHIONOYA, J

机构：

[1] Department of Chemical Engineering, Kyoto University, Kyoto

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 05期

关键词：

Chemical vapor deposition; Magnesium; 2-ethylhexanoate; Magnesium caprylate; Magnesium octanoate; Magnesium oxide; Thermal decomposition reaction; Thin film; X-ray diffraction analysis;

D O I：

10.1143/JJAP.29.L810

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Magnesium oxide thin films were prepared by a low-temperature atmospheric-pressure chemical vapor deposition method. The raw material was magnesium 2-ethylhexanoate, which is nontoxic and easy to handle. The deposition can be carried out in air. At a reaction temperature above 450°C, a highly [100]-oriented polycrystalline film can be obtained on amorphous substrates. © 1990 The Japan Society of Applied Physics.

引用

页码：L810 / L811

页数：2