NEW METHOD FOR THE GROWTH OF GAAS EPILAYER AT LOW H-2 PRESSURE

被引:70
作者
DUCHEMIN, JP
BONNET, M
KOELSCH, F
HUYGHE, D
机构
关键词
D O I
10.1016/0022-0248(78)90432-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:181 / 186
页数:6
相关论文
共 21 条
[1]  
AMBRIDGE T, 1975, I PHYS C SER, V24
[2]   HILLOCKS ON EPITAXIAL GAAS GROWN FROM TRIMETHYLGALLIUM AND ARSINE [J].
BALIGA, BJ ;
GHANDHI, SK .
JOURNAL OF CRYSTAL GROWTH, 1974, 26 (02) :314-316
[3]   GROWTH AND PROPERTIES OF HETEROEPITAXIAL GALNAS ALLOYS ON GAAS SUBSTRATES USING TRIMETHYLGALLIUM, TRIETHYLINDIUM, AND ARSINE [J].
BALIGA, BJ ;
GHANDHI, SK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (05) :683-687
[4]   HETEROEPITAXIAL INAS GROWN ON GAAS FROM TRIETHYLINDIUM AND ARSINE .2. ELECTRICAL PROPERTIES [J].
BALIGA, BJ ;
GHANDI, SK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (12) :1646-1650
[5]  
BASS JB, UNPUBLISHED
[6]   DEVICE QUALITY EPITAXIAL GALLIUM-ARSENIDE GROWN BY METAL ALKYL-HYDRIDE TECHNIQUE [J].
BASS, SJ .
JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) :172-178
[7]  
DUCHEMIN JP, 1977, REV TECHN THOMSON CS, V9
[8]  
DUCHEMIN JP, 1978, J ELECTROCHEM SOC, V125, P637
[10]   PROPERTIES OF EPITAXIAL GALLIUM-ARSENIDE FROM TRIMETHYLGALLIUM AND ARSINE [J].
ITO, S ;
SHINOHARA, T ;
SEKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1419-1423