CARBON NITRIDE DEPOSITED USING ENERGETIC SPECIES - A 2-PHASE SYSTEM

被引：784

作者：

MARTON, D

BOYD, KJ

ALBAYATI, AH

TODOROV, SS

RABALAIS, JW

机构：

[1] Department of Chemistry, University of Houston, Houston

来源：

PHYSICAL REVIEW LETTERS | 1994年 / 73卷 / 01期

关键词：

D O I：

10.1103/PhysRevLett.73.118

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Carbon nitride films deposited by three different methods have been analyzed using in situ Auger electron spectroscopy and ex situ x-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectrometry. The XPS data for all 27 samples indicate that these films have a similar composition consisting of two phases. One phase has a stoichiometry near C3N4 and is identified as a tetrahedral component. The other phase has a variable stoichiometry from C5N to C2N and is identified as predominantly an sp2 bonded structure. For a film composition of [N]/[C] < 1, the tetrahedrally bonded component grows only moderately as the nitrogen content of the films is increased.

引用

页码：118 / 121

页数：4

共 18 条

[1]

ALBAYATI AH, IN PRESS

[2]

BARBER M, 1973, J CHEM SOC F2, V69, P551

[3]

BOEHLAND H, 1981, Z CHEM, V10, P372

[4]

BOUSETTA A, IN PRESS

[5] ANALYTICAL ELECTRON-MICROSCOPY AND RAMAN-SPECTROSCOPY STUDIES OF CARBON NITRIDE THIN-FILMS [J].

CHEN, MY ;

LI, D ;

LIN, X ;

DRAVID, VP ;

CHUNG, YW ;

WONG, MS ;

SPROUL, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1993, 11 (03) :521-524

[6]

CUI XT, 1994, IN PRESS SPR P MRS M

[7]

Gelius U., 1970, Physica Scripta, V2, DOI 10.1088/0031-8949/2/1-2/014

[8] A DUAL-SOURCE LOW-ENERGY MASS-ANALYZED ION-BEAM SYSTEM FOR SEMICONDUCTOR EPITAXY AND NOVEL MATERIALS GROWTH [J].

GORDON, JS ;

ARMOUR, DG ;

DONNELLY, SE ;

VANDENBERG, JA ;

MARTON, D ;

RABALAIS, JW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :312-315

[9] INTERACTIONS OF LOW-ENERGY REACTIVE IONS WITH SURFACES .4. CHEMICALLY BONDED DIAMOND-LIKE FILMS FROM ION-BEAM DEPOSITION [J].

KASI, SR ;

KANG, H ;

RABALAIS, JW .

JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (09) :5914-5924

[10]

LIFSHITZ Y, IN PRESS DIAMOND REL

← 1 2 →