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TRANSIENT OPTICAL-PROPERTIES OF EXCIMER-LASER-IRRADIATED POLYIMIDE .2. CARBON-CLUSTER SCATTERING

被引：11
作者：
BALL, Z
HOPP, B
CSETE, M
IGNACZ, F
RACZ, B
SZABO, G
SAUERBREY, R
机构：
[1] HUNGARIAN ACAD SCI,LASER PHYS RES GRP,H-6720 SZEGED,HUNGARY
[2] RICE UNIV,RICE QUANTUM INST,HOUSTON,TX 77251
[3] JATE UNIV,DEPT OPT & QUANTUM ELECTR,H-6720 SZEGED,HUNGARY
[4] UNIV JENA,INST OPT & QUANTUM ELECTR,D-07743 JENA,GERMANY
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1995年 / 61卷 / 06期
关键词：
D O I：
10.1007/BF01542866
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Experiments involving time-resolved scattering and transmission in ArF (193nm) excimer-laser-irradiated polyimide are reported. Scattering experiments determined that constituents of the carbon layer responsible for laser-induced electrical conductivity form between 150 and 400 ns after the excimer pulse. Transmission experiments indicate that absorbing carbon is present before the formation of organized crystallites responsible for electrical conduction and scattering.
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页码：575 / 578
页数：4
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