共 11 条
[2]
Bor Z., 1983, Acta Universitatis Szegediensis, Acta Physica et Chemica, V29, P17
[4]
PHILLIPS H, UNPUB
[5]
A REVIEW OF EXCIMER LASER PROJECTION LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (01)
:1-17
[6]
ATTAINMENT OF 0.13-MUM LINES AND SPACES BY EXCIMER-LASER PROJECTION LITHOGRAPHY IN DIAMOND-LIKE CARBON-RESIST
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (01)
:389-390