SUB-100 NM LINES PRODUCED BY DIRECT LASER ABLATION IN POLYIMIDE

被引:85
作者
PHILLIPS, HM
CALLAHAN, DL
SAUERBREY, R
SZABO, G
BOR, Z
机构
[1] RICE UNIV,DEPT MAT SCI,HOUSTON,TX 77251
[2] RICE UNIV,RICE QUANTUM INST,HOUSTON,TX 77251
[3] ATTILA JOZSEF UNIV,DEPT OPT & QUANTUM ELECTR,H-6701 SZEGED,HUNGARY
关键词
D O I
10.1063/1.104778
中图分类号
O59 [应用物理学];
学科分类号
摘要
Periodic line structures with a period of 167 nm and linewidths varying from 35 to 100 nm have been produced on polyimide by direct ablation with a KrF laser using an interferometric technique. Since ablation is a nonlinear process, the resolution can exceed that expected from the wavelength and numerical aperture of the system and the linewidth can be controlled by varying the laser fluence. This externally generated period of 167 nm prevents the spontaneous growth of periodic surface structures due to radiation remnants.
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收藏
页码:2761 / 2763
页数:3
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