PERIODIC SURFACE-STRUCTURES IN THE EXCIMER LASER ABLATIVE ETCHING OF POLYMERS

被引：91

作者：

DYER, PE

FARLEY, RJ

机构：

[1] Department of Applied Physics, University of Hull

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 08期

关键词：

D O I：

10.1063/1.103414

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Periodic surface structures have been observed on organic polymers when photoablated using low coherence excimer lasers. Both unpolarized and linearly polarized radiation at 248 and 308 nm produce well ordered, micron-scale structures over dimensions greatly exceeding the coherence area of the laser at the surface. Surface scattered wave effects appear to explain these structures.

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页码：765 / 767

页数：3

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