DIRECT-ETCHING STUDIES OF POLYMER-FILMS USING A 157-NM F2 LASER

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719

[2] THE OPTICAL-PROPERTIES OF KAPTON - MEASUREMENT AND APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3579 - 3582

[3] BECK R, 1980, TABLE LASER LINES GA

[4] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 7201 - 7204

[5] EXCIMER LASER PROJECTION MICROMACHINED FREESTANDING POLYMER-FILMS [J]. OPTICS AND LASERS IN ENGINEERING, 1985, 6 (02) : 67 - 77

[6] EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) : 1420 - 1422

[7] DYER PE, 1984, C LASERS ELECTROOPTI

[8] GORDETSKY G, 1985, APPL PHYS LETT, V46, P828

[9] SELF-DEVELOPING PHOTORESIST USING A VACUUM ULTRAVIOLET F2 EXCIMER LASER EXPOSURE [J]. APPLIED PHYSICS LETTERS, 1985, 46 (09) : 900 - 902

[10] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1112 - 1114

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719

[2] THE OPTICAL-PROPERTIES OF KAPTON - MEASUREMENT AND APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3579 - 3582

[3] BECK R, 1980, TABLE LASER LINES GA

[4] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 7201 - 7204

[5] EXCIMER LASER PROJECTION MICROMACHINED FREESTANDING POLYMER-FILMS [J]. OPTICS AND LASERS IN ENGINEERING, 1985, 6 (02) : 67 - 77

[6] EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) : 1420 - 1422

[7] DYER PE, 1984, C LASERS ELECTROOPTI

[8] GORDETSKY G, 1985, APPL PHYS LETT, V46, P828

[9] SELF-DEVELOPING PHOTORESIST USING A VACUUM ULTRAVIOLET F2 EXCIMER LASER EXPOSURE [J]. APPLIED PHYSICS LETTERS, 1985, 46 (09) : 900 - 902

[10] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1112 - 1114