EXCIMER LASER PROJECTION MICROMACHINED FREESTANDING POLYMER-FILMS

被引：16

作者：

DYER, PE

SIDHU, J

机构：

来源：

OPTICS AND LASERS IN ENGINEERING | 1985年 / 6卷 / 02期

关键词：

D O I：

10.1016/0143-8166(85)90015-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：67 / 77

页数：11

共 16 条

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[2]

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[4]

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[5] EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].

DYER, PE ;

SIDHU, J .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422

[6]

DYER PE, 1984, CLEO 84 ANAHEIM

[7]

Gaskill J. D., 1978, LINEAR SYSTEMS FOURI

[8]

JAIN K, 1983, LASER APPLICATIO SEP

[9] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J].

KOREN, G ;

YEH, JTC .

APPLIED PHYSICS LETTERS, 1984, 44 (12) :1112-1114

[10]

LANE RJ, 1984, CLEO 84 ANAHEIM

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