CONTROLLED NUCLEATION AEROSOL REACTORS - PRODUCTION OF BULK SILICON

[1] ALAM MK, 1984, J COLLOID INTERF SCI, V97, P232

[2] THE BEHAVIOR OF CONSTANT RATE AEROSOL REACTORS [J]. AEROSOL SCIENCE AND TECHNOLOGY, 1982, 1 (01) : 3 - 13

[3] Hirschfelder J. O., 1964, MOL THEORY GASES LIQ

[4] HETEROGENEOUS DECOMPOSITION OF SILANE IN A FIXED-BED REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) : 1531 - 1535

[5] LAY RR, 1981, 15TH P IEEE PHOT SPE, P565

[6] LEVIN H, 1980, S MATERIALS NEW PROC

[7] KINETICS AND MECHANISM OF THE SILANE DECOMPOSITION [J]. INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1979, 11 (11) : 1167 - 1182

[8] Padovani F. A., 1978, US Patent, Patent No. [4,092,446, 4154870]

[9] THE EFFECT OF A GROWING AEROSOL ON THE RATE OF HOMOGENEOUS NUCLEATION OF A VAPOR [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1981, 82 (02) : 465 - 479

[10] PRATURI AK, 1979, DOEJPL101220 JET PRO

[1] ALAM MK, 1984, J COLLOID INTERF SCI, V97, P232

[2] THE BEHAVIOR OF CONSTANT RATE AEROSOL REACTORS [J]. AEROSOL SCIENCE AND TECHNOLOGY, 1982, 1 (01) : 3 - 13

[3] Hirschfelder J. O., 1964, MOL THEORY GASES LIQ

[4] HETEROGENEOUS DECOMPOSITION OF SILANE IN A FIXED-BED REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) : 1531 - 1535

[5] LAY RR, 1981, 15TH P IEEE PHOT SPE, P565

[6] LEVIN H, 1980, S MATERIALS NEW PROC

[7] KINETICS AND MECHANISM OF THE SILANE DECOMPOSITION [J]. INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1979, 11 (11) : 1167 - 1182

[8] Padovani F. A., 1978, US Patent, Patent No. [4,092,446, 4154870]

[9] THE EFFECT OF A GROWING AEROSOL ON THE RATE OF HOMOGENEOUS NUCLEATION OF A VAPOR [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1981, 82 (02) : 465 - 479

[10] PRATURI AK, 1979, DOEJPL101220 JET PRO